Micro and Nanotechnology

Course

Semiconductor Physics

Semiconductors Silicon Crystal Structure Direct vs Indirect Semiconductors Optical Processes in Semiconductors

Microscopy & Instrumentation

Scanning Tunnelling Microscope Atomic Force Microscope Scanning Profilometer Optical Microscopy Submicron Movement Control

Optics & Electron Physics

Lenses Optical Aberrations Wave Optics Wave-Particle Duality Richardson’s Law Electron Flux Interactions of Electrons with Matter

Photonics

Laser Structures Optical Waveguides Absorption Spectroscopy Photoluminescene

Characterisation

X-Ray Diffraction Miller Indices Diffraction Orders Bragg’s Law Hall Effect Measuring Carrier Scattering Van der Pauw Schokley Equation Measuring Resistance of Diodes

Fabrication

Cleanrooms Fabrication Oxidation Epitaxy Doping Implantation

Etching

Wet Etching Dry Etching Sputtering

Examples

Bragg’s Law Example Question Combination of Lenses Example Electron Flux Example Oxidation Rate Example Quantum Tunneling Question Richardson’s Law Example Question Wavelength Example Question Deal Grove Example Question Formula Prep Example Questions

Micro and Nanotechnology Quizzes

Micro and Nanotechnology Introduction Tutorial Questions Cleanroom and Device Process Design Tutorial Questions Optical Microscopy and Lithography Tutorial Questions Electron Beam Microscopy and Lithography Tutorial Questions Scanning Probe Microscopy Tutorial Questions Thin Films Tutorial Questions Advanced Design and Epitaxy Tutorial Questions LED and Semiconductor Characterisation Tutorial Questions Subtractive Processing & Pattern Transfer Tutorial Questions Dry Etching Tutorial Questions Semiconductor Doping Tutorial Questions

2022 Micro and Nano Past Paper 2022 Claude Micro and Nano Past Paper

2023 Micro and Nano Past Paper

2024 PP Micro

Optics Problem Solving Guide

Extended Micro and Nanotechnology Formula Sheet

Formulae and Constants

Fundamental Physical Constants

Constant	Symbol	Value and Units
Speed of light in vacuum	$c$	$2.998\times 10^8{\text{m s}}^{-1}$
Vacuum permittivity	${ϵ}_0$	$8.854\times 10^{-12}{\text{F m}}^{-1}$
Vacuum permeability	${\mu }_0$	$1.257\times 10^{-6}{\text{H m}}^{-1}$
Planck constant (in eV)	$h$	$4.136\times 10^{-15}\text{eV s}$
Planck constant (in J)	$h$	$6.626\times 10^{-34}\text{J s}$
Reduced Planck constant	$\hslash$	$1.055\times 10^{-34}\text{J s}$
Mass of electron	$m_e$	$9.109\times 10^{-31}\text{kg}$
Mass of neutron	$m_n$	$1.675\times 10^{-27}\text{kg}$
Elementary charge	$e$	$1.602\times 10^{-19}\text{C}$
Boltzmann constant	$k_B$	$1.381\times 10^{-23}{\text{J K}}^{-1}$
Electronvolt conversion	$1\text{eV}$	$1.602\times 10^{-19}\text{J}$

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Diffusion and Implantation

$D=D_0,e^{\left(\frac{-E_a}{kT}\right)}$

$F=-D\frac{\partial C}{\partial x}$

$C(x,t)=C_s,\text{erfc}\left(\frac{x}{2\sqrt{Dt}}\right)$

$Q(t)=\frac{2}{\sqrt{\pi }}{C}_s\sqrt{Dt}\approx 1.13,C_s\sqrt{Dt}$

$C(x,t)=\frac{Q}{\sqrt{\pi Dt}}\exp \left(-\frac{x^2}{4Dt}\right)$

$C_s(t)=\frac{Q}{\sqrt{\pi Dt}}$

$C(x)=\frac{Q}{\sqrt{2\pi }\cdot \Delta R_p}\cdot \exp \left(-\frac{1}{2}\cdot {\left(\frac{x-R_p}{\Delta R_p}\right)}^2\right)$

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Dry and Wet Etching

$\text{Rate}=A\cdot e^{\frac{E_a}{RT}}$

$\frac{\text{scattered}}{\text{initial}}=\frac{4m_i{m}_t}{(m_i+m_t{)}^2}{\cos }^2\theta$

$\frac{\text{scattered}}{\text{initial}}=\frac{\Delta U}{\frac{1}{2}{m}_i{u}_i^2}=\frac{m_t}{m_t+m_i}{\cos }^2\theta$

Things to Remember Micro and Nano

Notes

https://echo360.org.uk/lesson/G_38a3fe9b-9f9c-4bab-80cd-d2875cf9b546_fd905142-e411-408b-afd7-5faa91e181b5_2026-02-09T14:02:00.000_2026-02-09T16:58:00.000/classroom quiz